Instrument >> LED instrument >> Automatic Online flatness and surface appearance system:UltraSort200


Product introduce

       The  UltraSort continues our 25 year tradition of providing metrology solutions to semiconductor wafer manufacturers. Designed for volume wafer production, this automated system offers superior performance in rapid, repeatable, accurate, noncontact qualification of silicon and alternative substrate wafers.

       UltraSort is an automated wafer flatness analysis system that includes cassette-tocassette wafer handling with user configurable sorting capability. This Class 100 cleanroom compliant system integrates a grazing-incidence interferometer with industry standard robotic handling. The UltraSort can be configured to measure wafer sizes from 2 inches to 8 inches in diameter, and is well suited for a variety of different materials including gallium arsenide, sapphire, quartz, germanium, silicon and many others.


Technical information:



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