PV instrument >> Instrument for Wafer >> Silicon O/C Content Tester:HS-OCT-6700


Product Introduction:

       The HS-OCT-6700 system used to measure the O&C in silicon ingot and wafers. The system is the highest performance FT-IR systems available. While the spectrometer has the power to handle the most advanced research-level experiments, routine analyses are performed just as conveniently. Every facet of the Nicolet FT-IR spectrometer has been engineered to facilitate sample handling, introduce options to scientists, and increase laboratory throughput.


Product Features:

The HS-OCT-6700 is the highest level analysis system to measure silicon material, it developed above a common optical and electrical system.

The software could handle data acquisition, storage, analyze and output, which is based on Windows.

The system software can rapidly and accurately measure the Oxygen and Carbon containment in silicon ingot and wafer, and can measure the thin film thickness, BPSG analyze, PSG analyze, FSG analyze and SiN /SiON analyze

Can automatically measure the sample with highly repeatable accuracy even between different systems.

The system provide a humidity level detect function, which can provide a worn to operator to exchange the desiccant.

The optical stage use NASA patent to seal the whole system, which provide the damage to the optical system.

The system is designed based on whole system, easy to use and maitainance, the operator could use and exchange optical parts without train.

Use ETC EverGloTM light source, patent steel liquid nitrogen holder, SUB data communication, DSP data calculate, 24 A/D system, plug and play system, all of the technology make sure the result have highest stable, accuracy and reliable.

High-performance TE cooled detectors. Faster cooling using less power –higher stability, quicker response time.

Smart Purge keeps sample environment stable during sample or accessory changes.

Smart Accessories are the cornerstones to successful sample handling. Our Smart Accessory standard is supported by all major accessory vendors.


Circumstance requirements:

Humidity level in 25: within 60%

Without magnetic disturb, without strong vibrate.

Keep the room clean, dry, without dusty and corrosive gases.



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