Auto Spectroscopic Ellipsometer

全自动光谱椭偏仪

The PH-ASE spectroscopic ellipsometer  measures thickness, refractive index and extinction coefficient of single films and multilayer stacks. Reflection measurements at different incident angles and transmission measurements can be carried out and combined with ellipsometric data.


Product's Feature

 

The spectroscopic ellipsometer is used for thin film and material characterization in R & D. The spectroscopic ellipsometer is designed to meet the requirements in modern research with special emphasis on speed and accuracy for an unmatched variety of applications.

Automatic calibration and Measurement
Measurement of thickness and refractive index of transparent films on absorbing or transparent substrates
Analysis of amorphous and polysilicon films and SOI films
Measurement of optical constants of photoresists
Analysis of organic films
Measurements of isotropic materials and films
Eliminates the blind spot of the whole wavelength range
Measured transparent and absorbing substrates
Experimental data and simulated 3D graphics data
Friendly interface, powerful data analysis




Technique Specification

Angle range: 20 ° to 90 ° automatic control ,5°/step
Wavelength range :350-850nm, 250-1100nm, 190-2500nm: 0.002 ° ~ 0.02 °
Wavelength accuracy: 1nm
Measuring time: <8s
Angle accuracy: 0.01
Thickness range 0.01 nm - 50,000 nm
Extinction ratio : 10-6



Typical Customer:
American,Europe and Asia and so on.